JPH0454481Y2 - - Google Patents
Info
- Publication number
- JPH0454481Y2 JPH0454481Y2 JP3136085U JP3136085U JPH0454481Y2 JP H0454481 Y2 JPH0454481 Y2 JP H0454481Y2 JP 3136085 U JP3136085 U JP 3136085U JP 3136085 U JP3136085 U JP 3136085U JP H0454481 Y2 JPH0454481 Y2 JP H0454481Y2
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- flexible plate
- driving
- micro
- laminated piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 38
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 description 23
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3136085U JPH0454481Y2 (en]) | 1985-03-05 | 1985-03-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3136085U JPH0454481Y2 (en]) | 1985-03-05 | 1985-03-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61147405U JPS61147405U (en]) | 1986-09-11 |
JPH0454481Y2 true JPH0454481Y2 (en]) | 1992-12-21 |
Family
ID=30531898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3136085U Expired JPH0454481Y2 (en]) | 1985-03-05 | 1985-03-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0454481Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2792667B2 (ja) * | 1989-03-09 | 1998-09-03 | 株式会社日立製作所 | 板状柔軟構造物の振動抑制装置 |
-
1985
- 1985-03-05 JP JP3136085U patent/JPH0454481Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS61147405U (en]) | 1986-09-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0510698B1 (en) | Displacement amplification mechanism using piezoelectric element | |
WO1999063652A1 (en) | Solid-state receiver | |
US6411010B1 (en) | Piezoelectric actuator | |
CN203799672U (zh) | 精密定位平台 | |
CN111030505A (zh) | 二次位移放大型压电驱动器 | |
JPH1190867A (ja) | マイクロマニピュレータ | |
JPH0454481Y2 (en]) | ||
WO2007077878A1 (ja) | 気体圧制御アクチュエータ、気体圧制御アクチュエータ用気体軸受機構及び気体圧制御アクチュエータを用いた微小変位出力装置 | |
US6278223B1 (en) | Differential type piezoelectric actuator | |
CN110224634A (zh) | 压电陶瓷位移驱动器 | |
CN209731109U (zh) | 压电陶瓷位移驱动器 | |
CN115395818A (zh) | 压电驱动装置 | |
JPH05305574A (ja) | 圧電クランプ機構 | |
CN111377397A (zh) | 一种微纳加工系统及控制方法 | |
JPH01238759A (ja) | 6自由度精密微動台 | |
JPS59150756A (ja) | 印字機構 | |
CN204231227U (zh) | 可调预紧力式惯性粘滑驱动跨尺度精密定位平台 | |
JPS62159088A (ja) | 移動ステ−ジ装置 | |
JPH02139269A (ja) | 微小変位拡大機構及び該機構を用いた印字ヘッド | |
JPH0131491Y2 (en]) | ||
JPS6147272A (ja) | 機械的増幅機構 | |
CN115940691A (zh) | 法向准零刚度、切向高刚度的夹持机构 | |
CN113630036A (zh) | 一种驻波型压电超声电机运动分辨率提升装置和方法 | |
JPH0413175Y2 (en]) | ||
JPH0968657A (ja) | ステージの移動機構 |